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產(chǎn)品詳情
簡單介紹:
STPH451C Edwards渦輪分子泵這種泵經(jīng)過實(shí)踐檢驗(yàn)的性和的性能可以實(shí)現(xiàn)大的制程靈活性。STPH451C 已經(jīng)由半導(dǎo)體和磁介質(zhì)行業(yè)的大型設(shè)備制造商投入使用,并得到了。
STPH451C Edwards渦輪分子泵Edwards 的高性能 STPH451C 渦輪分子泵是為嚴(yán)苛的半導(dǎo)體應(yīng)用而設(shè)計(jì)的。
詳情介紹:
概述
Edwards 的高性能 STPH451C 渦輪分子泵是為嚴(yán)苛的半導(dǎo)體應(yīng)用而設(shè)計(jì)的。這種泵經(jīng)過實(shí)踐檢驗(yàn)的性和的性能可以實(shí)現(xiàn)大的制程靈活性。STPH451C 已經(jīng)由半導(dǎo)體和磁介質(zhì)行業(yè)的大型設(shè)備制造商投入使用,并得到了。
應(yīng)用
金屬(鋁)、鎢和電介質(zhì)(氧化物)以及多晶硅等離子刻蝕(氯化物、氟化物和溴化物)
電子回旋共振 (ECR) 刻蝕
薄膜沉積 CVD、PECVD、ECRCVD、MOCVD
濺射
離子注入源,射束線泵送端點(diǎn)站
MBE
擴(kuò)散
光致抗蝕劑脫模
晶體/晶膜生長
晶片檢查
負(fù)載鎖真空腔
科學(xué)儀器:表面分析、質(zhì)譜分析、電子顯微鏡
高能物理:射束線、加速器
放射線應(yīng)用:融合系統(tǒng)、回旋
功能和優(yōu)勢(shì)
的轉(zhuǎn)子
更高的氣體吞吐量
大的制程靈活性
無油
低振動(dòng)
高度
免維護(hù)
可用于嚴(yán)苛制程
使用壽命延長
的控制器設(shè)計(jì)
自動(dòng)調(diào)整
自行診斷功能
直流電機(jī)驅(qū)動(dòng)
無電池運(yùn)行
緊湊型設(shè)計(jì)
占地面積小
半機(jī)架控制器
5 軸磁懸浮系統(tǒng)
無污染
少維護(hù)
Edwards STP-451 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump, 480 l/s Pumping Speed, DN160CF CF 8 in.
Pump Only NO Accessories. Edwards Part Number B74841010
Edwards 的高性能 STPH451C 渦輪分子泵是為嚴(yán)苛的半導(dǎo)體應(yīng)用而設(shè)計(jì)的。這種泵經(jīng)過實(shí)踐檢驗(yàn)的性和的性能可以實(shí)現(xiàn)大的制程靈活性。STPH451C 已經(jīng)由半導(dǎo)體和磁介質(zhì)行業(yè)的大型設(shè)備制造商投入使用,并得到了。
應(yīng)用
金屬(鋁)、鎢和電介質(zhì)(氧化物)以及多晶硅等離子刻蝕(氯化物、氟化物和溴化物)
電子回旋共振 (ECR) 刻蝕
薄膜沉積 CVD、PECVD、ECRCVD、MOCVD
濺射
離子注入源,射束線泵送端點(diǎn)站
MBE
擴(kuò)散
光致抗蝕劑脫模
晶體/晶膜生長
晶片檢查
負(fù)載鎖真空腔
科學(xué)儀器:表面分析、質(zhì)譜分析、電子顯微鏡
高能物理:射束線、加速器
放射線應(yīng)用:融合系統(tǒng)、回旋
功能和優(yōu)勢(shì)
的轉(zhuǎn)子
更高的氣體吞吐量
大的制程靈活性
無油
低振動(dòng)
高度
免維護(hù)
可用于嚴(yán)苛制程
使用壽命延長
的控制器設(shè)計(jì)
自動(dòng)調(diào)整
自行診斷功能
直流電機(jī)驅(qū)動(dòng)
無電池運(yùn)行
緊湊型設(shè)計(jì)
占地面積小
半機(jī)架控制器
5 軸磁懸浮系統(tǒng)
無污染
少維護(hù)
任意方向操作
數(shù)據(jù)
入口法蘭 | ISO160K |
KF40 | |
吹掃口 | KF10 |
水冷卻接頭 | PT1/4 |
抽速 |
|
N2 | 450 ls-1 |
H2 | 300 ls-1 |
壓縮比 |
|
N2 | >108 |
H2 | 103 |
加熱時(shí)的極限壓力 | 10-7 Pa |
|
(10-9 Torr) |
大連續(xù)壓力 | 660 Pa |
|
(5 Torr) |
大氮?dú)馔掏铝?/span> | 2500 sccm |
額定速度 | 48000 rpm |
啟動(dòng)時(shí)間 | 4 分鐘 |
高入口法蘭溫度 | 120 °C |
輸入電壓 | 100 至 120 (± 10) V 交流或 |
|
200 至 240 (± 10) V 交流 |
功耗 | 0.6 kVA |
泵重量 | 15 kg |
控制器重量 | 9 kg |
Pump Only NO Accessories. Edwards Part Number B74841010
This listing is for the new Edwards STP-451 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump. To be used with the Edwards SCU-350 Control Unit, pumping speed of 480 liters per second (l/s) of nitrogen, DN160CF CF 8 in. inlet flange, ISO KF-25 exhaust foreline flange, and KF-10 purge port with the corrosion model. A basic pump system would require a Edwards STP-451 pump, a SCU-350 controller, a water cooling accessory and a suitable backing roughing pump. The Edwards STP-451 turbomolecular pump offers field proven reliability for use in electron miscroscopes, scientific instruments and semiconductor applications.
The STP-451 is a series of magnetically-levitated turbomolecular pumps. The STP pump is configured so that rotor blade and the stator blade are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. The Rotor blade is supported by the magnetic bearing without mechanical contact. Therefore the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is supported in the radial direction by 2 pairs of radial direction active magnetic bearings that consist of radial sensor and radial electromagnet. A pair of axial direction active magnetic bearings consists of axial sensor and axial electromagnet to support the rotor in the axial direction. Because the rotor is thus supported without mechanical contact, it can rotate with very low vibration.
There is less heat generated from magnetic bearings because there is no friction. Therefore the STP pump requires no cooling. However, the STP pump requires water cooling or air cooling during baking, gas pumping or any process. Taking into consideration a breakage of magnetic bearings, touch down bearings and coated with solid lubrication have been installed. They do not contact the rotor during the rated operation. A radial sensor, an axial sensor, a rotational speed sensor and a temperature sensor always monitor the magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop.
To ensure a high level of resistance to corrosion, the corrosion resistant models STP (C) have nickel coated rotors/stators and pump inter-nals suitable for ion implantation and plasma etching. These corrosion resistant pumps have a KF10 nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils. All accessories for this pump are available on this website or call 505-872-0037 for details. For complete specs, see graphic below or download the STP manual.pdf in AVAILABLE DOWNLOADS below.
The STP-451 is a series of magnetically-levitated turbomolecular pumps. The STP pump is configured so that rotor blade and the stator blade are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. The Rotor blade is supported by the magnetic bearing without mechanical contact. Therefore the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is supported in the radial direction by 2 pairs of radial direction active magnetic bearings that consist of radial sensor and radial electromagnet. A pair of axial direction active magnetic bearings consists of axial sensor and axial electromagnet to support the rotor in the axial direction. Because the rotor is thus supported without mechanical contact, it can rotate with very low vibration.
There is less heat generated from magnetic bearings because there is no friction. Therefore the STP pump requires no cooling. However, the STP pump requires water cooling or air cooling during baking, gas pumping or any process. Taking into consideration a breakage of magnetic bearings, touch down bearings and coated with solid lubrication have been installed. They do not contact the rotor during the rated operation. A radial sensor, an axial sensor, a rotational speed sensor and a temperature sensor always monitor the magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop.
To ensure a high level of resistance to corrosion, the corrosion resistant models STP (C) have nickel coated rotors/stators and pump inter-nals suitable for ion implantation and plasma etching. These corrosion resistant pumps have a KF10 nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils. All accessories for this pump are available on this website or call 505-872-0037 for details. For complete specs, see graphic below or download the STP manual.pdf in AVAILABLE DOWNLOADS below.
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