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- GX系列半導體干式泵
產品詳情
簡單介紹：
STP-iXR1606 ISO200F 愛德華磁懸浮渦輪分子泵可提供業(yè)內的性能，機載控制裝置中包含新的小型電源供給。
STP-iXR1606 ISO200F 愛德華磁懸浮渦輪分子泵其設計理念與 STP-iXA2206/iXA3306 系列相同。 新的**性轉子設計提高了抽取性能， 這一集成的產品易于安裝且占地面積小，可作為應用工具的一體化解決方案。
詳情介紹：
概述
STP-iXR1606 系列磁懸浮渦輪分子泵可提供業(yè)內的性能，機載控制裝置中包含新的小型電源供給。其設計理念與 STP-iXA2206/iXA3306 系列相同。 新的**性轉子設計提高了抽取性能， 這一集成的產品易于安裝且占地面積小，可作為應用工具的一體化解決方案。
應用
玻璃涂層
太陽能 PVD
工業(yè)濺射
特性與優(yōu)勢
泵和控制器之間不需要連接電纜。
消除了傳統(tǒng)架裝式控制器的安裝空間和成本。
緊湊型設計使安裝更加方便，占地面積更小。
與 STP-A1603 配套時在 8” TMP 同類產品中抽速高。
使高氣體流速的功耗降低了 32%。
標配端口包括 I/O 遠程、RS232C、RS485、STP-Link
可選配 Profibus 和 DeviceNet
The STP iXR1606 Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXR1606 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status & Magnet bearing current.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXR1606 can be used for a variety of applications including but not limited to:
STP-iXR1606 系列磁懸浮渦輪分子泵可提供業(yè)內的性能，機載控制裝置中包含新的小型電源供給。其設計理念與 STP-iXA2206/iXA3306 系列相同。 新的**性轉子設計提高了抽取性能， 這一集成的產品易于安裝且占地面積小，可作為應用工具的一體化解決方案。
應用
玻璃涂層
太陽能 PVD
工業(yè)濺射
特性與優(yōu)勢
泵和控制器之間不需要連接電纜。
消除了傳統(tǒng)架裝式控制器的安裝空間和成本。
緊湊型設計使安裝更加方便，占地面積更小。
與 STP-A1603 配套時在 8” TMP 同類產品中抽速高。
使高氣體流速的功耗降低了 32%。
標配端口包括 I/O 遠程、RS232C、RS485、STP-Link
可選配 Profibus 和 DeviceNet
數(shù)據(jù)
| 入口法蘭 | VG150 | VG200/VG250 |
|
|
ISO160F | ISO200F/ISO250F |
|
|
ICF203 | ICF253/ICF305 |
| 后備口 | KF40 | KF40 |
| 抽取速度 |
|
|
| N2 | 1000 ls-1 | 1600 ls-1 |
| H2 | 800 ls-1 | 1200 ls-1 |
| 壓縮比 |
|
| N2 | >108 |
| H2 | 1 x 103 |
| 極限壓力 | 10-7 Pa (10-9 Torr) |
| 允許的前級壓力 | 266 Pa (2 Torr) |
| 大氣流 N2（僅水冷） | 4700 sccm |
|
|
(7.94 Pam3s-1) |
| 大氣流 Ar（僅水冷） | 1800 sccm |
|
|
(3.04 Pam3s-1) |
| 額定速度 | 36,500 rpm |
| 啟動時間 | 8 min |
| 固定位置 | 任何方向 |
| 輸入電壓 | 200 至 240 (± 10) V 交流 |
| 大輸入功率 | 750 VA |
| 重量 | 48 kg |
Edwards STP iXR1606 5-axis Magnetic Bearing Turbo-Molecular Pump, ISO160F Inlet, Integrated Controller and built in power supply.
Edwards PN YT790Z070.
Edwards PN YT790Z070.
The STP iXR1606 Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXR1606 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status & Magnet bearing current.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXR1606 can be used for a variety of applications including but not limited to:
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
